4/14/2010	11:21:00 AM	Main Vac valve closed
4/14/2010	11:21:00 AM	Main Vac valve opened
4/14/2010	11:21:02 AM	Main Vac valve closed
4/14/2010	11:21:02 AM	Main Vac valve opened
4/14/2010	11:21:04 AM	Main Vac valve closed
4/14/2010	11:21:04 AM	Bypass valve closed
4/14/2010	11:21:07 AM	Helium valve opened
4/14/2010	11:21:08 AM	Helium valve closed
4/14/2010	11:21:15 AM	Helium valve opened
4/14/2010	11:21:17 AM	Helium valve closed
4/14/2010	11:21:27 AM	Helium valve opened
4/14/2010	11:21:28 AM	Helium valve closed
4/14/2010	11:21:30 AM	Main Vac valve opened
4/14/2010	11:21:34 AM	Bypass valve opened
4/14/2010	11:23:32 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/14/2010	11:23:32 AM	Recipe started at 11:23 AM
4/14/2010	11:23:32 AM	H2 valve closed
4/14/2010	11:23:32 AM	BCl3 valve closed
4/14/2010	11:23:32 AM	PH3 valve closed
4/14/2010	11:23:32 AM	SiCl4 pre valve closed
4/14/2010	11:23:32 AM	SiCl4 post valve closed
4/14/2010	11:23:32 AM	Main Vac valve closed
4/14/2010	11:23:32 AM	Bypass valve closed
4/14/2010	11:23:32 AM	Bubbler valve closed
4/14/2010	11:23:32 AM	Helium valve opened
4/14/2010	11:23:32 AM	Helium MFC set to  500.000000
4/14/2010	11:23:32 AM	H2 MFC set to  0.000000
4/14/2010	11:23:32 AM	BCl3 MFC set to  0.000000
4/14/2010	11:23:32 AM	SiCl4 MFC set to  0.000000
4/14/2010	11:23:32 AM	Bypass solenoid MFC set to  0.000000
4/14/2010	11:23:33 AM	Tube furnace set to 0
4/14/2010	11:25:00 AM	Helium valve closed
4/14/2010	11:25:00 AM	H2 valve closed
4/14/2010	11:25:00 AM	BCl3 valve closed
4/14/2010	11:25:00 AM	PH3 valve closed
4/14/2010	11:25:00 AM	SiCl4 pre valve closed
4/14/2010	11:25:00 AM	SiCl4 post valve closed
4/14/2010	11:25:00 AM	Main Vac valve closed
4/14/2010	11:25:00 AM	Bypass valve closed
4/14/2010	11:25:00 AM	Bubbler valve closed
4/14/2010	11:25:00 AM	Helium MFC set to  0.000000
4/14/2010	11:25:00 AM	H2 MFC set to  0.000000
4/14/2010	11:25:00 AM	BCl3 MFC set to  0.000000
4/14/2010	11:25:00 AM	SiCl4 MFC set to  0.000000
4/14/2010	11:25:00 AM	Bypass solenoid MFC set to  0.000000
4/14/2010	11:25:00 AM	Tube furnace set to 0
4/14/2010	11:25:00 AM	Run finished at 11:25 AM
4/14/2010	11:25:00 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/14/2010	11:45:01 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/14/2010	11:45:02 AM	Recipe started at 11:45 AM
4/14/2010	11:45:02 AM	Helium valve closed
4/14/2010	11:45:02 AM	H2 valve closed
4/14/2010	11:45:02 AM	BCl3 valve closed
4/14/2010	11:45:02 AM	PH3 valve closed
4/14/2010	11:45:02 AM	SiCl4 pre valve closed
4/14/2010	11:45:02 AM	SiCl4 post valve closed
4/14/2010	11:45:02 AM	Main Vac valve closed
4/14/2010	11:45:02 AM	Bubbler valve closed
4/14/2010	11:45:02 AM	Bypass valve opened
4/14/2010	11:45:02 AM	Helium MFC set to  0.000000
4/14/2010	11:45:02 AM	H2 MFC set to  0.000000
4/14/2010	11:45:02 AM	BCl3 MFC set to  0.000000
4/14/2010	11:45:02 AM	SiCl4 MFC set to  0.000000
4/14/2010	11:45:02 AM	Bypass solenoid MFC set to  0.000000
4/14/2010	11:45:02 AM	Tube furnace set to 0
4/14/2010	11:46:29 AM	Run aborted at 11:46 AM
4/14/2010	11:46:29 AM	Helium valve closed
4/14/2010	11:46:29 AM	H2 valve closed
4/14/2010	11:46:29 AM	BCl3 valve closed
4/14/2010	11:46:29 AM	PH3 valve closed
4/14/2010	11:46:29 AM	SiCl4 pre valve closed
4/14/2010	11:46:29 AM	SiCl4 post valve closed
4/14/2010	11:46:29 AM	Bypass valve closed
4/14/2010	11:46:29 AM	Main Vac valve closed
4/14/2010	11:46:29 AM	Bubbler valve closed
4/14/2010	11:46:29 AM	Helium MFC set to  0.000000
4/14/2010	11:46:29 AM	H2 MFC set to  0.000000
4/14/2010	11:46:29 AM	BCl3 MFC set to  0.000000
4/14/2010	11:46:29 AM	SiCl4 MFC set to  0.000000
4/14/2010	11:46:29 AM	Tube furnace set to 0
4/14/2010	11:46:29 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/14/2010	11:46:32 AM	Main Vac valve opened
4/14/2010	11:48:37 AM	Main Vac valve closed
4/14/2010	11:50:26 AM	Main Vac valve opened
4/14/2010	11:51:31 AM	Main Vac valve closed
4/14/2010	11:51:39 AM	Main Vac valve opened
4/14/2010	11:54:16 AM	Main Vac valve closed
4/14/2010	11:54:59 AM	Main Vac valve opened
4/14/2010	11:55:22 AM	Main Vac valve closed
4/14/2010	11:55:36 AM	Main Vac valve opened
4/14/2010	12:01:04 PM	Main Vac valve closed
4/14/2010	12:02:31 PM	Main Vac valve opened
4/14/2010	12:02:44 PM	Main Vac valve closed
4/14/2010	12:03:22 PM	Main Vac valve opened
4/14/2010	12:03:24 PM	Bypass valve closed
4/14/2010	12:03:32 PM	Bypass valve opened
4/14/2010	12:03:49 PM	Bypass valve closed
4/14/2010	12:04:29 PM	Main Vac valve closed
4/14/2010	12:06:06 PM	Main Vac valve opened
4/14/2010	12:11:17 PM	Main Vac valve closed
4/14/2010	12:11:33 PM	Main Vac valve opened
4/14/2010	1:33:01 PM	Main Vac valve closed
4/14/2010	1:33:44 PM	Main Vac valve opened
4/14/2010	1:33:51 PM	SiCl4 post valve opened
4/14/2010	1:34:51 PM	SiCl4 post valve closed
4/14/2010	1:36:12 PM	SiCl4 post valve opened
4/14/2010	1:41:44 PM	SiCl4 post valve closed
4/14/2010	1:44:36 PM	Main Vac valve closed
4/14/2010	1:44:44 PM	Main Vac valve opened
4/14/2010	1:46:11 PM	Main Vac valve closed
4/14/2010	1:46:23 PM	Main Vac valve opened
4/14/2010	1:48:12 PM	Main Vac valve closed
4/14/2010	1:48:16 PM	Main Vac valve opened
4/14/2010	1:50:41 PM	Main Vac valve closed
4/14/2010	1:50:46 PM	Main Vac valve opened
4/14/2010	1:50:48 PM	Helium valve opened
4/14/2010	1:51:12 PM	Helium MFC set to  100.000000
4/14/2010	1:51:26 PM	Helium MFC set to  500.000000
4/14/2010	1:55:42 PM	Helium valve closed
4/14/2010	1:57:04 PM	Main Vac valve closed
4/14/2010	1:57:10 PM	Main Vac valve opened
4/14/2010	1:57:50 PM	SiCl4 post valve opened
4/14/2010	2:01:42 PM	Main Vac valve closed
4/14/2010	2:01:51 PM	Main Vac valve opened
4/14/2010	2:49:04 PM	Main Vac valve closed
4/14/2010	2:49:12 PM	Main Vac valve opened
4/14/2010	2:49:13 PM	SiCl4 post valve closed
4/14/2010	2:50:35 PM	Main Vac valve closed
4/14/2010	2:50:56 PM	Main Vac valve opened
4/14/2010	2:51:33 PM	SiCl4 post valve opened
4/14/2010	2:51:56 PM	SiCl4 post valve closed
4/14/2010	2:52:16 PM	SiCl4 post valve opened
4/14/2010	2:53:06 PM	SiCl4 post valve closed
4/14/2010	2:53:22 PM	SiCl4 post valve opened
4/14/2010	2:54:30 PM	Main Vac valve closed
4/14/2010	2:55:33 PM	Main Vac valve opened
4/14/2010	2:55:48 PM	SiCl4 post valve closed
4/14/2010	2:56:12 PM	Main Vac valve closed
4/14/2010	2:57:12 PM	Main Vac valve opened
4/14/2010	3:00:15 PM	Main Vac valve closed
4/14/2010	3:00:27 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/14/2010	3:00:27 PM	Recipe started at 3:00 PM
4/14/2010	3:00:27 PM	H2 valve closed
4/14/2010	3:00:27 PM	BCl3 valve closed
4/14/2010	3:00:27 PM	PH3 valve closed
4/14/2010	3:00:27 PM	SiCl4 pre valve closed
4/14/2010	3:00:27 PM	SiCl4 post valve closed
4/14/2010	3:00:27 PM	Main Vac valve closed
4/14/2010	3:00:27 PM	Bypass valve closed
4/14/2010	3:00:27 PM	Bubbler valve closed
4/14/2010	3:00:27 PM	Helium valve opened
4/14/2010	3:00:27 PM	Helium MFC set to  500.000000
4/14/2010	3:00:27 PM	H2 MFC set to  0.000000
4/14/2010	3:00:27 PM	BCl3 MFC set to  0.000000
4/14/2010	3:00:27 PM	SiCl4 MFC set to  0.000000
4/14/2010	3:00:27 PM	Bypass solenoid MFC set to  0.000000
4/14/2010	3:00:27 PM	Tube furnace set to 0
4/14/2010	3:01:55 PM	Helium valve closed
4/14/2010	3:01:55 PM	H2 valve closed
4/14/2010	3:01:55 PM	BCl3 valve closed
4/14/2010	3:01:55 PM	PH3 valve closed
4/14/2010	3:01:55 PM	SiCl4 pre valve closed
4/14/2010	3:01:55 PM	SiCl4 post valve closed
4/14/2010	3:01:55 PM	Main Vac valve closed
4/14/2010	3:01:55 PM	Bypass valve closed
4/14/2010	3:01:55 PM	Bubbler valve closed
4/14/2010	3:01:55 PM	Helium MFC set to  0.000000
4/14/2010	3:01:55 PM	H2 MFC set to  0.000000
4/14/2010	3:01:55 PM	BCl3 MFC set to  0.000000
4/14/2010	3:01:55 PM	SiCl4 MFC set to  0.000000
4/14/2010	3:01:55 PM	Bypass solenoid MFC set to  0.000000
4/14/2010	3:01:55 PM	Tube furnace set to 0
4/14/2010	3:01:56 PM	Run finished at 3:01 PM
4/14/2010	3:01:56 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/14/2010	3:02:26 PM	SiCl4 post valve opened
4/14/2010	3:04:23 PM	SiCl4 post valve closed
4/14/2010	3:04:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/14/2010	3:04:30 PM	Recipe started at 3:04 PM
4/14/2010	3:04:30 PM	Helium valve closed
4/14/2010	3:04:30 PM	H2 valve closed
4/14/2010	3:04:30 PM	BCl3 valve closed
4/14/2010	3:04:30 PM	PH3 valve closed
4/14/2010	3:04:30 PM	SiCl4 pre valve closed
4/14/2010	3:04:30 PM	SiCl4 post valve closed
4/14/2010	3:04:30 PM	Main Vac valve closed
4/14/2010	3:04:30 PM	Bubbler valve closed
4/14/2010	3:04:30 PM	Bypass valve opened
4/14/2010	3:04:30 PM	Helium MFC set to  0.000000
4/14/2010	3:04:30 PM	H2 MFC set to  0.000000
4/14/2010	3:04:30 PM	BCl3 MFC set to  0.000000
4/14/2010	3:04:30 PM	SiCl4 MFC set to  0.000000
4/14/2010	3:04:30 PM	Bypass solenoid MFC set to  0.000000
4/14/2010	3:04:30 PM	Tube furnace set to 0
4/14/2010	3:04:53 PM	Run aborted at 3:04 PM
4/14/2010	3:04:53 PM	Helium valve closed
4/14/2010	3:04:53 PM	H2 valve closed
4/14/2010	3:04:53 PM	BCl3 valve closed
4/14/2010	3:04:53 PM	PH3 valve closed
4/14/2010	3:04:53 PM	SiCl4 pre valve closed
4/14/2010	3:04:53 PM	SiCl4 post valve closed
4/14/2010	3:04:53 PM	Bypass valve closed
4/14/2010	3:04:53 PM	Main Vac valve closed
4/14/2010	3:04:53 PM	Bubbler valve closed
4/14/2010	3:04:53 PM	Helium MFC set to  0.000000
4/14/2010	3:04:53 PM	H2 MFC set to  0.000000
4/14/2010	3:04:53 PM	BCl3 MFC set to  0.000000
4/14/2010	3:04:53 PM	SiCl4 MFC set to  0.000000
4/14/2010	3:04:54 PM	Tube furnace set to 0
4/14/2010	3:04:54 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/14/2010	3:04:56 PM	Bypass valve closed
4/14/2010	3:04:58 PM	Bypass valve opened
4/14/2010	3:04:59 PM	Bypass valve closed
4/14/2010	3:04:59 PM	Bypass valve opened
4/14/2010	3:05:01 PM	Bypass valve closed
4/14/2010	3:05:02 PM	Bypass valve opened
4/14/2010	3:05:05 PM	Bypass valve closed
4/14/2010	3:05:06 PM	Bypass valve opened
4/14/2010	3:06:09 PM	Main Vac valve opened
4/14/2010	3:06:53 PM	Program exited cleanly
4/14/2010	3:07:36 PM	Program started normally
4/14/2010	3:07:36 PM	Helium valve closed
4/14/2010	3:07:36 PM	H2 valve closed
4/14/2010	3:07:36 PM	BCl3 valve closed
4/14/2010	3:07:36 PM	PH3 valve closed
4/14/2010	3:07:36 PM	SiCl4 pre valve closed
4/14/2010	3:07:36 PM	SiCl4 post valve closed
4/14/2010	3:07:36 PM	Main Vac valve closed
4/14/2010	3:07:36 PM	Bypass valve closed
4/14/2010	3:07:36 PM	Bubbler valve closed
4/14/2010	3:07:36 PM	Helium MFC set to  0.000000
4/14/2010	3:07:36 PM	H2 MFC set to  0.000000
4/14/2010	3:07:36 PM	BCl3 MFC set to  0.000000
4/14/2010	3:07:36 PM	SiCl4 MFC set to  0.000000
4/14/2010	3:07:36 PM	Bypass solenoid MFC set to  760.000000
4/14/2010	3:07:36 PM	Tube furnace set to 0
4/14/2010	3:07:39 PM	Bypass valve opened
4/14/2010	3:07:40 PM	Main Vac valve opened
4/14/2010	3:07:46 PM	Tube furnace set to 11
4/14/2010	3:07:52 PM	Tube furnace set to 0
4/14/2010	3:07:55 PM	Tube furnace set to 1
4/14/2010	3:07:59 PM	Tube furnace set to 0
4/14/2010	3:24:02 PM	Bypass valve closed
4/14/2010	3:24:03 PM	Main Vac valve closed
4/14/2010	3:24:09 PM	Main Vac valve opened
4/14/2010	3:24:09 PM	Main Vac valve closed
4/14/2010	3:24:10 PM	Main Vac valve opened
4/14/2010	3:24:11 PM	Bypass valve opened
4/14/2010	3:26:47 PM	Bypass valve closed
4/14/2010	3:26:51 PM	Main Vac valve closed
4/14/2010	3:26:58 PM	Main Vac valve opened
4/14/2010	3:27:54 PM	SiCl4 post valve opened
4/14/2010	3:33:28 PM	SiCl4 post valve closed
4/14/2010	3:33:52 PM	Main Vac valve closed
4/14/2010	3:34:03 PM	Main Vac valve opened
4/14/2010	3:34:11 PM	SiCl4 post valve opened
4/14/2010	3:34:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/14/2010	3:34:28 PM	Recipe started at 3:34 PM
4/14/2010	3:34:28 PM	H2 valve closed
4/14/2010	3:34:28 PM	BCl3 valve closed
4/14/2010	3:34:28 PM	PH3 valve closed
4/14/2010	3:34:28 PM	SiCl4 pre valve closed
4/14/2010	3:34:28 PM	SiCl4 post valve closed
4/14/2010	3:34:28 PM	Main Vac valve closed
4/14/2010	3:34:28 PM	Bypass valve closed
4/14/2010	3:34:28 PM	Bubbler valve closed
4/14/2010	3:34:28 PM	Helium valve opened
4/14/2010	3:34:28 PM	Helium MFC set to  500.000000
4/14/2010	3:34:28 PM	H2 MFC set to  0.000000
4/14/2010	3:34:28 PM	BCl3 MFC set to  0.000000
4/14/2010	3:34:28 PM	SiCl4 MFC set to  0.000000
4/14/2010	3:34:28 PM	Bypass solenoid MFC set to  0.000000
4/14/2010	3:34:28 PM	Tube furnace set to 0
4/14/2010	3:35:56 PM	Helium valve closed
4/14/2010	3:35:56 PM	H2 valve closed
4/14/2010	3:35:56 PM	BCl3 valve closed
4/14/2010	3:35:56 PM	PH3 valve closed
4/14/2010	3:35:56 PM	SiCl4 pre valve closed
4/14/2010	3:35:56 PM	SiCl4 post valve closed
4/14/2010	3:35:56 PM	Main Vac valve closed
4/14/2010	3:35:56 PM	Bypass valve closed
4/14/2010	3:35:56 PM	Bubbler valve closed
4/14/2010	3:35:56 PM	Helium MFC set to  0.000000
4/14/2010	3:35:56 PM	H2 MFC set to  0.000000
4/14/2010	3:35:56 PM	BCl3 MFC set to  0.000000
4/14/2010	3:35:56 PM	SiCl4 MFC set to  0.000000
4/14/2010	3:35:56 PM	Bypass solenoid MFC set to  0.000000
4/14/2010	3:35:56 PM	Tube furnace set to 0
4/14/2010	3:35:56 PM	Run finished at 3:35 PM
4/14/2010	3:35:56 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/14/2010	4:01:15 PM	SiCl4 post valve opened
4/14/2010	4:04:58 PM	SiCl4 post valve closed
4/14/2010	4:04:59 PM	SiCl4 post valve opened
4/14/2010	4:05:00 PM	SiCl4 post valve closed
4/14/2010	4:14:52 PM	SiCl4 post valve opened
4/14/2010	4:14:53 PM	SiCl4 post valve closed
4/14/2010	4:14:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/14/2010	4:14:57 PM	Recipe started at 4:14 PM
4/14/2010	4:14:57 PM	Helium valve closed
4/14/2010	4:14:57 PM	H2 valve closed
4/14/2010	4:14:57 PM	BCl3 valve closed
4/14/2010	4:14:57 PM	PH3 valve closed
4/14/2010	4:14:57 PM	SiCl4 pre valve closed
4/14/2010	4:14:57 PM	SiCl4 post valve closed
4/14/2010	4:14:57 PM	Main Vac valve closed
4/14/2010	4:14:57 PM	Bubbler valve closed
4/14/2010	4:14:57 PM	Bypass valve opened
4/14/2010	4:14:57 PM	Helium MFC set to  0.000000
4/14/2010	4:14:57 PM	H2 MFC set to  0.000000
4/14/2010	4:14:57 PM	BCl3 MFC set to  0.000000
4/14/2010	4:14:57 PM	SiCl4 MFC set to  0.000000
4/14/2010	4:14:57 PM	Bypass solenoid MFC set to  0.000000
4/14/2010	4:14:58 PM	Tube furnace set to 0
4/14/2010	4:15:27 PM	Helium valve closed
4/14/2010	4:15:27 PM	H2 valve closed
4/14/2010	4:15:27 PM	BCl3 valve closed
4/14/2010	4:15:27 PM	PH3 valve closed
4/14/2010	4:15:27 PM	SiCl4 pre valve closed
4/14/2010	4:15:27 PM	SiCl4 post valve closed
4/14/2010	4:15:27 PM	Bubbler valve closed
4/14/2010	4:15:27 PM	Main Vac valve opened
4/14/2010	4:15:27 PM	Bypass valve opened
4/14/2010	4:15:27 PM	Helium MFC set to  0.000000
4/14/2010	4:15:27 PM	H2 MFC set to  0.000000
4/14/2010	4:15:27 PM	BCl3 MFC set to  0.000000
4/14/2010	4:15:27 PM	SiCl4 MFC set to  0.000000
4/14/2010	4:15:27 PM	Bypass solenoid MFC set to  0.000000
4/14/2010	4:15:28 PM	Tube furnace set to 0
4/14/2010	4:15:28 PM	Run finished at 4:15 PM
4/14/2010	4:15:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/14/2010	4:22:52 PM	BCl3 valve opened
4/14/2010	4:22:53 PM	BCl3 valve closed
4/14/2010	4:22:54 PM	BCl3 valve opened
4/14/2010	4:22:54 PM	BCl3 valve closed
4/14/2010	4:22:55 PM	BCl3 valve opened
4/14/2010	4:22:55 PM	BCl3 valve closed
4/14/2010	4:23:01 PM	BCl3 valve opened
4/14/2010	4:23:01 PM	BCl3 valve closed
4/14/2010	4:23:26 PM	Program exited cleanly
4/14/2010	4:48:31 PM	Program started normally
4/14/2010	4:48:31 PM	Helium valve closed
4/14/2010	4:48:31 PM	H2 valve closed
4/14/2010	4:48:31 PM	BCl3 valve closed
4/14/2010	4:48:31 PM	PH3 valve closed
4/14/2010	4:48:31 PM	SiCl4 pre valve closed
4/14/2010	4:48:31 PM	SiCl4 post valve closed
4/14/2010	4:48:31 PM	Main Vac valve closed
4/14/2010	4:48:31 PM	Bypass valve closed
4/14/2010	4:48:31 PM	Bubbler valve closed
4/14/2010	4:48:31 PM	Helium MFC set to  0.000000
4/14/2010	4:48:31 PM	H2 MFC set to  0.000000
4/14/2010	4:48:31 PM	BCl3 MFC set to  0.000000
4/14/2010	4:48:31 PM	SiCl4 MFC set to  0.000000
4/14/2010	4:48:31 PM	Bypass solenoid MFC set to  760.000000
4/14/2010	4:48:31 PM	Tube furnace set to 0
4/14/2010	4:48:32 PM	Main Vac valve opened
4/14/2010	4:48:34 PM	Bypass valve opened
4/14/2010	9:27:03 PM	Helium valve opened
4/14/2010	9:27:08 PM	Helium MFC set to  500.000000
4/14/2010	9:27:15 PM	Helium valve closed
4/14/2010	9:27:16 PM	Helium valve opened
4/14/2010	9:27:19 PM	Helium valve closed
4/14/2010	9:27:26 PM	Helium valve opened
4/14/2010	9:29:59 PM	Helium valve closed
4/14/2010	9:30:00 PM	Helium valve opened
4/14/2010	9:30:03 PM	SiCl4 post valve opened
4/14/2010	9:30:37 PM	SiCl4 MFC set to  100.000000
4/14/2010	9:31:00 PM	SiCl4 pre valve opened
4/14/2010	9:31:16 PM	SiCl4 pre valve closed
4/14/2010	9:31:24 PM	SiCl4 MFC set to  100.000000
4/14/2010	9:31:48 PM	SiCl4 pre valve opened
4/14/2010	9:58:43 PM	Bypass valve closed
4/14/2010	9:58:44 PM	Main Vac valve closed
4/14/2010	9:58:53 PM	Bypass valve opened
4/14/2010	9:58:54 PM	Main Vac valve opened
